pulsed laser deposition 算是蒸鍍的一種, 它是利用pulsed laser瞬間給與靶材(target)足夠的能量...我想你遇到的系統應該是它同時擁有PLD跟SD(sputtering deposition )囉
...寬比結構鍍膜更是元件尺寸縮減(scale-down) 的關鍵。原子層沉積技術 (atomic layer deposition , ALD) 係利用反應氣體與基板之間的氣－固相反應，故可達成未來製程需求...
...the possibility of roll-to-roll processing using low-cost spray of chemical deposition or direct-write approaches to producing thin-film solar cells...
...spin-on process是在電子材料表面形成光阻膜或有機半導體膜等薄膜時所用的積層( deposition )技術 先將精確量的液體前驅物(liquid precursor)塗佈在晶圓表面,再將晶圓以...
...&qid=1176609788&sr=11-1 $239.00 2. Thin-Film Deposition : Principles and Practice ISBN-10: 0070585024 Donald...
...含有化學反應的機制，可以區分為物理氣相沈積（Physical Vapor Deposition ，簡稱PVD）通常稱為物理蒸鍍及化學氣相沈積（Chemical ...
...jpg (from http://en.wikipedia.org/wiki/Plasma-enhanced_chemical_vapor_ deposition ) Film examples Plasma deposition is often used...
